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Semiconductor devices. Micro-electromechanical devices - RF MEMS switches

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Semiconductor devices. Micro-electromechanical devices - RF MEMS switches1 Scope This part of IEC 62047 describes terminology, definition, symbols, test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches. The statements made in this standardization are also applicable to RF (Radio Frequency) MEMS (Micro Electro Mechanical Systems) switches with various structures, contacts (d. c. contact and capacitive contact), configurations (series and shunt),

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it covers:

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